Synthesis of nanocrystalline delta-MoN by thermal annealing of amorphous thins films grown on (100) Si by reactive DC sputtering at room temperature by Haberkorn, N., Bengio, S., Troiani, H., Suárez, S., Pérez, P. D., Sirena, M., Guimpel, J., Haberkorn, Néstor, Guimpel, Julio

Subjects: “…Metal nitrides…”
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