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  1. 1
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    Fundamentals of microfabrication : the science of miniaturization. by Madou, Marc J.

    Published 2002.
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  2. 2
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    Micro and nanomanufacturing. by Jackson, Mark J.

    Published 2007.
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  3. 3
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    Solidstate physics, fluidics, and analytical techniques in micro and nanotechnology by Madou, Marc J.

    Published 2012.
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