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The recrystallization of ion-implanted silicon layers. II: Implant species effect.
by
Christodoulides, C. E.
,
Baragiola, R. A.
,
Chivers, D.
,
Grant, W. A.
,
Williams, J. S.
Published 1978
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Ranges in silicon of ions with atomic numbers 62 ⩽ Z1 ⩽ 66 at 100 keV.
by
Baragiola, R. A.
,
Chivers, D.
,
Dodds, D.
,
Grant, W. A.
,
Williams, J. S.
Published 1976
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Biblioteca / Repositorio
Repositorio Institucional NUCLEA
2 results
2
Author
Baragiola, R. A.
2 results
2
Chivers, D.
Grant, W. A.
2 results
2
Williams, J. S.
2 results
2
Christodoulides, C. E.
1 results
1
Dodds, D.
1 results
1
Language
English
2 results
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