rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Fundamentals of microfabrication : the science of miniaturization
  name:
    name part: Madou, Marc J.
    role:
      role term: creator
  type of resource: text
  origin info:
    place:
      place term: xxu
    place:
      place term: Boca Raton, Fla
    publisher: CRC press
    date issued: 2002
    issuance: monographic
  language:
    language term: eng
  language:
    language term: en
  physical description:
    extent: 723 p. : il., tabla, diagr.
  target audience: specialized
  note: Apéndices: p.669-702
  note: Ejercicios y bibliografía al final de cada capítulo
  note: Ed. anterior: Fundamentals of microfabrication and nanotechnology. 3.ed.. Inventario: 50895
  subject:
    topic: SEMICONDUCTORES -DISPOSITIVOS
  subject:
    topic: MICROELECTROMECANICA
  subject:
    topic: MICROELECTRONICA
  subject:
    topic: MICROFABRICACION
  subject:
    topic: NANOTECNOLOGIA
  identifier: 0849308267
  record info:
    record creation date: 170703