rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Handbook of ion beam processing technology : principles, deposition, film modification and synthesis
  name:
    name part: Cuomo, Jerome J.
    role:
      role term: creator
    role:
      role term: ed.
  name:
    name part: Rossnagel, Stephen M.
    role:
      role term: ed.
  name:
    name part: Kaufman, Harold R.
    role:
      role term: ed.
  type of resource: text
  origin info:
    place:
      place term: xxu
    place:
      place term: Park Ridge, N.J
    publisher: Noyes publ.
    date issued: 1989
    issuance: monographic
  language:
    language term: eng
  language:
    language term: en
  physical description:
    extent: xviii, 438 p. : il., tabla, diagr.
  target audience: specialized
  note: Bibliografía al final de cada capítulo
  subject:
    topic: OPTICA IONICA -MANUALES
  subject:
    topic: BOMBARDEO DE IONES -APLICACIONES [INDUSTRIA] -MANUALES
  subject:
    topic: IMPLANTACION DE IONES -MANUALES
  related item:
    title info:
      title: Materials science and process technology series
  record info:
    record creation date: 170703