Nemanich, R. J. e. a. (1992). Chemical surface preparation, passivation and cleaning for semiconductor growth and processing. Materials research society.
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Chicago Style (17th ed.) Citation
Nemanich, R. J. et al. Chemical Surface Preparation, Passivation and Cleaning for Semiconductor Growth and Processing. Pittsburgh: Materials research society, 1992.
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MLA (9th ed.) Citation
Nemanich, R. J. et al. Chemical Surface Preparation, Passivation and Cleaning for Semiconductor Growth and Processing. Materials research society, 1992.
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Warning: These citations may not always be 100% accurate.