rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Electron beam interactions with solids for microscopy, microanalysis and microlithography
  name:
    name part: Kyser, David F.
    role:
      role term: creator
    role:
      role term: ed.
  name:
    name part: Conference on electron beam interactions with solids for microscopy, microanalysis and microlithography Monterey, Calif,US 1982
  name:
    name part: Pfefferkorn conference Monterey, Calif,US 1982
  type of resource: text
  genre: conference publication
  origin info:
    place:
      place term: xxu
    place:
      place term: AMF O'Hare, Il
    publisher: Scanning electron microscopy
    date issued: c1984
    date issued: 1984
    copyright date: ####
    issuance: monographic
  language:
    language term: eng
  language:
    language term: en
  physical description:
    extent: 372 p. : il. ; 28,5 cm.
  target audience: specialized
  note: Held at the Asilomar conference center
  note: Bibliografía al final de cada artículo
  subject:
    topic: RADIACIONES -EFECTOS EN SOLIDOS -CONGRESOS
  subject:
    topic: MICROSCOPIA ELECTRONICA
  classification: 539.2:539.12.04"1982"
  classification: 537.533.35
  identifier: 0931288304
  record info:
    record creation date: 170703