Similar Items: Fundamentals and potential applications of the LIGA technique in microoptics.
- CONCEPTUAL DESIGN, DEVELOPMENT AND MANUFACTURE OF A MICROMEMBRANE PUMP BY THE LIGA TECHNIQUE..
- Microminiature fluidic beam elements in LIGA-technique with integrated electrical control.
- Miniaturisiertes Spektrometersystem in LIGA-Technik.
- Wissensbasierte Modellierung des LIGA-Fertigungsprozesses.
- DEVELOPMENT OF A SUBSTRACTIVE PATTERNING TECHNIQUE FOR FABRICATION OF FIRST X-RAY MASKS USED IN LIGA PROCESS.
- Potential of low-temperature nuclear heat applications.